The rapid evolution of integrated circuit technology has brought with it many new materials and processing steps at the nano-scale which boost the electrical performance of devices, resulting in faster and more functionally-complex electronics. However, working at this reduced scale can bring second order effects that degrade efficiency and reliability.

• Chapter 1: Introduction
• Chapter 2: Device physics, modelling and technology for nano-scaled semiconductor devices
• Chapter 3: Advanced device characterisation techniques
• Chapter 4: The semiconductor device technology and its societal impact
• Chapter 5: The silicon era and beyond