SIMOX
The Institution of Engineering and Technology, 2004
Cloth: 978-0-86341-334-6 | Paper: 978-1-84919-063-3 | eISBN: 978-1-84919-064-0
Library of Congress Classification TK7871.85.S5554 2004
Dewey Decimal Classification 621.31937
Cloth: 978-0-86341-334-6 | Paper: 978-1-84919-063-3 | eISBN: 978-1-84919-064-0
Library of Congress Classification TK7871.85.S5554 2004
Dewey Decimal Classification 621.31937
ABOUT THIS BOOK | TOC
ABOUT THIS BOOK
SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.
See other books on: Electronics | Silicon-on-insulator technology | Technology & Engineering
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