edited by Hongrui Jiang
The Institution of Engineering and Technology, 2016
eISBN: 978-1-84919-898-1 | Cloth: 978-1-84919-897-4

ABOUT THIS BOOK | TOC
ABOUT THIS BOOK
Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others.