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Fabrication of GaAs Devices
by Albert G. Baca and Carol I.H. Ashby
The Institution of Engineering and Technology, 2005
Cloth: 978-0-86341-353-7 | eISBN: 978-1-84919-068-8 | Paper: 978-1-84919-067-1
Library of Congress Classification TK7871.15.G3B33 2005
Dewey Decimal Classification 621.38152

ABOUT THIS BOOK | TOC
ABOUT THIS BOOK

This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. This book is suitable for both new and practising engineers.

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